Segmentation phase measuring deflectometry for measuring structured specular surfaces

Abstract Accurate and fast three-dimensional (3D) measurement for industrial products/components designed to possess 3D structured shapes is a key driver improved productivity. However, challenges current techniques are considerable measure specular surfaces. A technique named segmentation phase measuring deflectometry (SPMD) proposed in this paper, which enables surfaces be measured with high accuracy one setup. Concept of topology introduced into deflectometry, separates surface complex structures continuous segments. Each segment can reconstructed based on gradient information achieve good form accuracy, all segments fused whole strucutred result their absolute spatial positioning data. Here, we propose discuss the principle SPMD, separate strucured segments, obtain position data fusion strategy fuse Experimental results show SPMD nanometer level by comparing stylus profilometer, significantly higher than direct deflectometry. Meanwhile, has micron two steps coordinate machine, differentiates from gradient-based that extends capability Compared existing techniques, convenience ability freeform advantages measurement, potential application embedded measurement.